High-Energy Resolution Microcalorimeter EDS System for Electron Beam Excitation
نویسندگان
چکیده
We have developed a microcalorimeter energy dispersive spectroscopy (EDS) system with high-energy resolution to analyze the composition in the materials with low voltage excitation. This system is based on the dilution refrigerator and has a snout like conventional EDS system. The energy resolution was 14.2 eV for Al-Kα line (1.5 keV) and the estimated count rate was 333 cps. We demonstrated the measurement of the energy spectra for three samples. A conventional EDS cannot separate between the Si-Kα (1470 eV) and W-Mα (1775 eV) lines. This separation is important in the semiconductor application and is one of the most difficult separation for the composition analysis. Our microcalorimeter EDS system could separate these peaks clearly for the WSi2 film (300 nm thickness) deposited on the silicon wafer when the excitation voltage was 5 kV.
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